Development of silicon-on-insulator waveguide technology
نویسندگان
چکیده
An overview of the present silicon-on-insulator (SOI) waveguide technology is given and supplemented with an extensive set of theory and simulation results. Characteristics of slab-, rectangularand ridge waveguides in SOI are explained. In particular, the number of modes and the single-mode conditions are carefully analyzed. Experimental work with straight and bent 8 to 10 μm thick SOI ridge waveguides and a very fast thermo-optical switch are reported. Propagation loss in a very long spiral waveguide down to 0.3 dB/cm, waveguide birefringence below 10, and a switching frequency up to 167 kHz were obtained. A very promising multi-step patterning principle for SOI waveguides is described together with many practical application examples.
منابع مشابه
Low loss coupler to interface silicon waveguide and hybrid plasmonic waveguide
A metallic coupler is proposed to interface a silicon on insulator (SOI) waveguide with a narrow hybrid plasmonic waveguide (200× 200 nm). The device operation is investigated and optimized to attain the best tradeoff between the mode confinement and the propagation loss. Calculations reveal that a high confinement and low loss of the energy is achieved from a silicon slab waveguide into the di...
متن کاملHeterogenous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-on-Insulator waveguide circuits
We present the heterogeneous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-onInsulator (SOI) waveguide circuits using benzocyclobutene (BCB) die to wafer bonding. This technology development enables the integration of a photonic interconnection layer on top of CMOS. Fabrication processes were optimized and the transfer of a passive Silicon-on-Insulator waveguide layer usin...
متن کاملEnhanced surface sensitivity in microring resonator biosensor based on subwavelength grating waveguides
Microring resonators on silicon-on-insulator substrate have been demonstrated to be promising in sensing applications. We study a microring resonator biosensor based on a novel subwavelength grating (SWG) waveguide structure, which consists of periodic silicon pillars in the propagation direction with a subwavelength period. In this structure, effective sensing region includes not only the top ...
متن کاملDesign and simulation of Silicon-on-Insulator based Integrated optic Directional coupler
In this paper, we present the design and simulation of silicon-on-insulator (SOI) based integrated optic Directional Coupler. Planar waveguide devices based on SOI architecture offer attractive possibility of miniaturization because of the high difference in refractive index between Silicon and SiO2. It has been shown that this technology offers the ability to make devices with sharper bends wi...
متن کاملSilicon-on-Insulator (SOI) Delay-Line Interferometer with Low Polarization-Dependent Wavelength Shift
A 40 Gbit/s delay-line interferometer realized in SOI rib waveguide technology is presented. Across the C-band we demonstrate high uniformity, low loss, low PDL, and PDF as low as 1 GHz for the SOI interferometer.
متن کامل